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Volume 1 , Issue 1 , December 2015 , Pages: 15 - 19
Surface Acoustic Waves in Thin Films Nanometrology
Andrea Bettucci, Department of Basic and Applied Sciences for Engineering, Sapienza University of Rome, Via A. Scarpa 16, Rome, Italy
Received: Jul. 13, 2015;       Accepted: Jul. 28, 2015;       Published: Jul. 29, 2015
DOI: 10.11648/j.nsnm.20150101.13        View        Downloads  
Abstract
Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology
Keywords
Surface Acoustic Wave, Acoustic Microscope, Photoacoustics, Thin Films
To cite this article
Andrea Bettucci, Surface Acoustic Waves in Thin Films Nanometrology, Nanoscience and Nanometrology. Vol. 1, No. 1, 2015, pp. 15-19. doi: 10.11648/j.nsnm.20150101.13
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